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US20050046427A1 Apparatus and method for improving microwave coupling to a resonant cavity 失效
用于改善与谐振腔的微波耦合的装置和方法

  • Patent Title: Apparatus and method for improving microwave coupling to a resonant cavity
  • Patent Title (中): 用于改善与谐振腔的微波耦合的装置和方法
  • Application No.: US10495774
    Application Date: 2003-01-31
  • Publication No.: US20050046427A1
    Publication Date: 2005-03-03
  • Inventor: Eric Strang
  • Applicant: Eric Strang
  • International Application: PCT/US03/01073 WO 20030131
  • Main IPC: G01R27/04
  • IPC: G01R27/04 ;  G03G15/00 ;  H01J37/32 ;  H01P7/06
Apparatus and method for improving microwave coupling to a resonant cavity
Abstract:
An equipment status monitoring system (10) and method of operating includes first (40) and second (50) microwave mirrors in a plasma processing chamber (20) each forming a multi-modal resonator. A power source (60) is coupled to the first mirror (40) and configured to produce an excitation signal. A detector (70) is coupled to at least one of the first mirror (40) and the second mirror (50) and configured to measure an excitation signal. At least one of the power source (60) and the detector (70) is coupled to a divergent aperture (44).
Abstract(Chinese):

设备状态监测系统（10）和操作方法包括等离子体处理室（20）中的每个形成多模共振器的第一（40）和第二（50）微波反射镜。 电源（60）耦合到第一反射镜（40）并且被配置为产生激励信号。 检测器（70）耦合到第一反射镜（40）和第二反射镜（50）中的至少一个并被配置成测量激励信号。 电源（60）和检测器（70）中的至少一个耦合到发散孔（44）。

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