发明申请
US20050052723A1 Electrostatic comb drive actuator, and optical controller using the electrostatic comb drive actuator
审中-公开
静电梳驱动执行器，以及使用静电梳驱动执行器的光控制器
- 专利标题： Electrostatic comb drive actuator, and optical controller using the electrostatic comb drive actuator
- 专利标题（中）： 静电梳驱动执行器，以及使用静电梳驱动执行器的光控制器
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申请号： US10895290申请日： 2004-07-21
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公开(公告)号： US20050052723A1公开(公告)日： 2005-03-10
- 发明人: Shin-Ichiro Watanabe , Koji Horio , Kenichi Muta , Masayoshi Esashi
- 申请人： Shin-Ichiro Watanabe , Koji Horio , Kenichi Muta , Masayoshi Esashi
- 优先权： JP2003-277821 20030722
- 主分类号： G02B26/02
- IPC分类号： G02B26/02 ; B81B3/00 ; G02B26/00
摘要：
An electrostatic comb drive actuator, characterized in that plural outer suspended elastic beams 2a and 2b are disposed in parallel to and outside plural inner suspended elastic beams 1a and 1b disposed in parallel to each other; the ends of the inner suspended elastic beams and the outer suspended elastic beams on both sides are connected with end connecting beams 3a and 3b; the outer suspended elastic beams are supported at their centers on a board 5; the inner suspended elastic beams are connected with each other at their centers by means of a working section 6; a movable comb electrode 7 is supported on the working section; and a fixed comb electrode 8 is supported on the board.
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