发明申请
US20050060874A1 Method for processing work piece including magnetic material and method for manufacturing magnetic recording medium
审中-公开
用于处理包括磁性材料的工件的方法和用于制造磁记录介质的方法
- 专利标题： Method for processing work piece including magnetic material and method for manufacturing magnetic recording medium
- 专利标题（中）： 用于处理包括磁性材料的工件的方法和用于制造磁记录介质的方法
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申请号： US10892373申请日： 2004-07-16
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公开(公告)号： US20050060874A1公开(公告)日： 2005-03-24
- 发明人: Mikiharu Hibi , Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa
- 申请人： Mikiharu Hibi , Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa
- 申请人地址： JP Chuo-ku
- 专利权人： TDK CORPORATION
- 当前专利权人： TDK CORPORATION
- 当前专利权人地址： JP Chuo-ku
- 优先权： JP2003-276571 20030718; JP2004-174263 20040611
- 主分类号： G11B5/127
- IPC分类号： G11B5/127 ; G11B5/31 ; G11B5/84 ; H01F41/14
摘要：
A method for processing a work piece including a magnetic material and a method for manufacturing a magnetic recording medium. With the use of these methods, the magnetic recording medium with fine magnetic properties, magnetic recording and reproducing equipment, and the like are efficiently manufactured by processing the work piece including the magnetic material by use of an oxidizing reactive gas and then certainly removing the oxidizing reactive gas. An NH3 gas (a non-oxidized gas including hydrogen elements) is used as a cleaning gas. The cleaning gas is turned into plasma, and then a work piece is dry cleaned by use of the cleaning gas.