发明申请
- 专利标题: Edge exposing apparatus
- 专利标题(中): 边缘曝光装置
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申请号: US10945652申请日: 2004-09-21
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公开(公告)号: US20050062951A1公开(公告)日: 2005-03-24
- 发明人: Kazuya Akiyama , Kenji Kamei , Kazuya Ono
- 申请人: Kazuya Akiyama , Kenji Kamei , Kazuya Ono
- 专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人: Dainippon Screen Mfg. Co., Ltd.
- 优先权: JP2003-329927 20030922
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03B27/42 ; H01L21/027
摘要:
An edge exposing apparatus includes a photo detector and a lighting time measuring circuit for detecting a decrease in performance of light source units. The same lighting time measuring circuit has a function to detect a ready state (i.e. stabilization of luminous intensity) of the light source units capable of performing edge exposure. When the lighting time measuring circuit detects a lighting time having reached a preset value, or when the photo detector detects a luminous intensity below a preset value, the light source units are determined to have lowered in performance, and are switched off. The lighting time measuring circuit measures a lighting time from a startup (switch-on) of the light source units, and when the lighting time reaches a preset value, the light source units are determined to have attained the ready state and edge exposure is started with the light source units. When a decrease in performance is detected, one light source unit is started while continuing edge exposure with the other light source unit. When a ready state is detected, the edge exposure with the light source unit is terminated (switch-off), and edge exposure is performed with the light source unit having attained the ready state.
公开/授权文献
- US07088423B2 Edge exposing apparatus 公开/授权日:2006-08-08
信息查询
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