发明申请
- 专利标题: Vacuum pumping system
- 专利标题(中): 真空泵系统
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申请号: US10669775申请日: 2003-09-24
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公开(公告)号: US20050063830A1公开(公告)日: 2005-03-24
- 发明人: Darren Mennie , Ron Lee , Robert Grant , Barrie Brewster , Joanne Greenwood
- 申请人: Darren Mennie , Ron Lee , Robert Grant , Barrie Brewster , Joanne Greenwood
- 主分类号: F04D17/16
- IPC分类号: F04D17/16 ; F04D19/04 ; F04B1/00
摘要:
A vacuum pumping system comprises a first gas supply for supplying a first gas, such as xenon, to a vacuum chamber. A pump receives the gas output from the chamber. A second gas supply supplies a purge gas, such as nitrogen or helium, for pumping with the first gas. A gas separator receives the pumped gases exhausted by the pump, and recovers the first gas and the purge gas from the stream. The recovered first gas is recirculated through the vacuum chamber, and the recovered second gas is recirculated through at least the pump.
公开/授权文献
- US07094036B2 Vacuum pumping system 公开/授权日:2006-08-22