Invention Application
US20050066825A1 Method for manufacturing stamper for information medium manufacture, stamper, and photoresist original disk 审中-公开
用于信息介质制造,压模和光致抗蚀剂原盘的压模的制造方法

Method for manufacturing stamper for information medium manufacture, stamper, and photoresist original disk
Abstract:
A stamper with a sharp protrusion/depression pattern is obtained, and high precision information media can be produced using this stamper. A method of manufacturing a stamper comprises the steps of manufacturing a photoresist master 100 by laminating a light absorption layer 103 and a photoresist layer 104 on top of a substrate 102, and then forming an protrusion/depression pattern 106 in the photoresist layer 104 by forming and developing a latent image, providing Pd on the surface of the protrusion/depression pattern 106 as a preliminary treatment to conducting electroless plating onto the protrusion/depression pattern of the photoresist master 100, and forming a stamper 120 by forming a thin metal film 108 on top of the Pd-containing protrusion/depression pattern surface by using electroless plating, forming a Ni film 110 on top of this Ni thin film 108 using electroforming, and then removing the thin metal film 108 and the Ni film 110.
Information query
Patent Agency Ranking
0/0