发明申请
US20050069457A1 Gas sensor with zinc oxide layer and method for forming the same 审中-公开
具有氧化锌层的气体传感器及其形成方法

Gas sensor with zinc oxide layer and method for forming the same
摘要:
A gas sensor (3) includes: a base (30), two electrodes (31, 32) formed on the base, a zinc oxide layer (34) formed on surfaces of the base and the electrodes. The zinc oxide layer includes a plurality of zinc oxide nanofibers, each having a columnar or a tubular microstructure. Preferably, the zinc oxide nanofibers are substantially parallel to each other and substantially perpendicular to the base and electrodes. Numerous apertures between adjacent zinc oxide nanofibers can retain gas molecules. If the microstructure is tubular, apertures within the zinc oxide nanofibers can also retain gas molecules. In either case, the sensitivity of the gas sensor is improved. A method is also provided.
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