发明申请
US20050069457A1 Gas sensor with zinc oxide layer and method for forming the same
审中-公开
具有氧化锌层的气体传感器及其形成方法
- 专利标题: Gas sensor with zinc oxide layer and method for forming the same
- 专利标题(中): 具有氧化锌层的气体传感器及其形成方法
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申请号: US10928679申请日: 2004-08-26
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公开(公告)号: US20050069457A1公开(公告)日: 2005-03-31
- 发明人: Chuan-De Huang , Wen-Jeng Huang
- 申请人: Chuan-De Huang , Wen-Jeng Huang
- 申请人地址: TW Tu-Cheng City
- 专利权人: HON HAI Precision Industry CO., LTD.
- 当前专利权人: HON HAI Precision Industry CO., LTD.
- 当前专利权人地址: TW Tu-Cheng City
- 优先权: TW092126963 20030930; TW092129257 20030930
- 主分类号: G01N27/12
- IPC分类号: G01N27/12 ; G01N27/02
摘要:
A gas sensor (3) includes: a base (30), two electrodes (31, 32) formed on the base, a zinc oxide layer (34) formed on surfaces of the base and the electrodes. The zinc oxide layer includes a plurality of zinc oxide nanofibers, each having a columnar or a tubular microstructure. Preferably, the zinc oxide nanofibers are substantially parallel to each other and substantially perpendicular to the base and electrodes. Numerous apertures between adjacent zinc oxide nanofibers can retain gas molecules. If the microstructure is tubular, apertures within the zinc oxide nanofibers can also retain gas molecules. In either case, the sensitivity of the gas sensor is improved. A method is also provided.
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