Invention Application
US20050079711A1 Hollow tip array with nanometer size openings and formation thereof
审中-公开
具有纳米尺寸开口的空心尖端阵列及其形成
- Patent Title: Hollow tip array with nanometer size openings and formation thereof
- Patent Title (中): 具有纳米尺寸开口的空心尖端阵列及其形成
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Application No.: US10683247Application Date: 2003-10-10
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Publication No.: US20050079711A1Publication Date: 2005-04-14
- Inventor: Heinz Busta
- Applicant: Heinz Busta
- Assignee: Cabot Microelectronics Corp.
- Current Assignee: Cabot Microelectronics Corp.
- Main IPC: B01L3/02
- IPC: B01L3/02 ; B41J2/14 ; B41J2/16 ; B81B1/00 ; B81B3/00 ; H01L21/302 ; H01L21/461
Abstract:
This invention provides tip assemblies and arrays of tip assemblies useful for nanoscale fluid delivery. The invention also provides methods of fabricating tip assemblies.
Information query
IPC分类:
