发明申请
- 专利标题： Flat-object holder and method of using the same
- 专利标题（中）： 扁平物体支架及其使用方法
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申请号： US10985949申请日： 2004-11-12
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公开(公告)号： US20050085171A1公开(公告)日： 2005-04-21
- 发明人: Yuzo Shimobeppu , Kazuo Teshirogi , Kazuhiro Yoshimoto , Mitsuhisa Watanabe , Yoshiaki Shinjo , Takashi Mori , Koichi Yajima , Yusuke Kimura
- 申请人： Yuzo Shimobeppu , Kazuo Teshirogi , Kazuhiro Yoshimoto , Mitsuhisa Watanabe , Yoshiaki Shinjo , Takashi Mori , Koichi Yajima , Yusuke Kimura
- 优先权： JP2001/320575 20011018; JP2001/366853 20011130
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01L21/304 ; H01L21/68 ; B24B7/30
摘要：
A flat-object holder can hold a flat object-and-frame assembly, and the holder has the flat object fixed to the frame with protection tape. The flat-object holder includes at least a flat object supporting area for fixedly holding the flat object via the protection tape by applying a suction force, and a frame fixing area for fastening the frame. The flat-object holder bearing the flat object-and-frame assembly can be fixedly held by a selected chuck table by applying a negative pressure to the flat object supporting area. The flat-object holder can transfer and put the flat object-and-frame assembly in a container. Thus, no matter how thin the flat object may be, it can be handled without the fear of breaking.
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