发明申请
- 专利标题： Oscillating scanning probe microscope
- 专利标题（中）： 振荡扫描探针显微镜
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申请号： US10700794申请日： 2003-11-04
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公开(公告)号： US20050092907A1公开(公告)日： 2005-05-05
- 发明人: Paul West , Richard Becker , Zhiqiang Peng
- 申请人： Paul West , Richard Becker , Zhiqiang Peng
- 主分类号： G01B21/30
- IPC分类号： G01B21/30 ; G01Q20/00 ; G01Q30/02 ; G01Q60/32 ; G01Q60/38 ; G01Q70/04 ; H01J3/14 ; H01J5/16
摘要：
A scanning probe microscope that is easy to use, inexpensive to manufacture, has a fast scan rate, and has a broad range of applications. The oscillating sensor has a high resonance frequency. Because an oscillator is used, alignment of a laser is not required. Further, probe approach and scanning can be achieved at much faster rates.
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