发明申请
- 专利标题: Optical system with birefringent optical elements
- 专利标题(中): 具有双折射光学元件的光学系统
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申请号: US10922380申请日: 2004-08-19
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公开(公告)号: US20050094268A1公开(公告)日: 2005-05-05
- 发明人: Damian Fiolka , Olaf Dittmann , Michael Totzeck , Nils Dieckmann , Jess Koehler , Toralf Gruner , Daniel Kraehmer
- 申请人: Damian Fiolka , Olaf Dittmann , Michael Totzeck , Nils Dieckmann , Jess Koehler , Toralf Gruner , Daniel Kraehmer
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE10211762.4 20020314
- 主分类号: G02B17/08
- IPC分类号: G02B17/08 ; G02B27/09 ; G02B27/28 ; G03F7/20 ; G02F1/1335
摘要:
An optical system (1) includes a first optical subsystem (3) with at least a first birefringent optical element (7), and further includes a second optical subsystem (5) with at least a second birefringent optical element (9). Between the first optical subsystem and the second optical subsystem, an optical retarding system (13) with at least a first optical retarding element (15) is arranged, which introduces a retardation of one-half of a wavelength between two mutually orthogonal states of polarization.
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |