发明申请
US20050100067A1 Semiconductor laser device capable of preventing a threshold current and an operating current from increasing and manufacturing method therefor 失效
能够防止阈值电流和工作电流的半导体激光装置的增加和制造方法

  • 专利标题: Semiconductor laser device capable of preventing a threshold current and an operating current from increasing and manufacturing method therefor
  • 专利标题(中): 能够防止阈值电流和工作电流的半导体激光装置的增加和制造方法
  • 申请号: US10602827
    申请日: 2003-06-25
  • 公开(公告)号: US20050100067A1
    公开(公告)日: 2005-05-12
  • 发明人: Atsuo Tsunoda
  • 申请人: Atsuo Tsunoda
  • 申请人地址: JP Osaka
  • 专利权人: SHARP KABUSHIKI KAISHA
  • 当前专利权人: SHARP KABUSHIKI KAISHA
  • 当前专利权人地址: JP Osaka
  • 优先权: JP2002-206873 20020716
  • 主分类号: H01S5/227
  • IPC分类号: H01S5/227 H01S5/00 H01S5/042 H01S5/22 H01S5/223 H01S5/343
Semiconductor laser device capable of preventing a threshold current and an operating current from increasing and manufacturing method therefor
摘要:
A ridge section constructed of a p-type second AlGaInP clad layer 8, a p-type GaInP interlayer 9 and a p-type GaAs cap layer 10 is formed on an etching stop layer 7. A step of not smaller than 0.13 μm is formed between the p-type interlayer 9 and the p-type second clad layer 8 by making the p-type interlayer 9 protrude in both widthwise directions beyond the p-type second clad layer 8. With this step, AlInP layers can be formed separately from each other on both sides of the ridge section and on the ridge section. Therefore, when the AlInP layer on the ridge section is removed by etching, an AlInP current constriction layer 13 located on both sides of the ridge section is reliably protected by a resist film and not over-etched. The AlInP current constriction layer 13 effectively puts a current constriction function into effect, so that a semiconductor laser device of low-threshold current and low-power consumption is obtained.
信息查询
0/0