发明申请
- 专利标题: High voltage transistor
- 专利标题(中): 高压晶体管
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申请号: US10878273申请日: 2004-06-28
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公开(公告)号: US20050104123A1公开(公告)日: 2005-05-19
- 发明人: Yong Kim , Dong Lee , Hee Chang
- 申请人: Yong Kim , Dong Lee , Hee Chang
- 优先权: KR2003-81957 20031119
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L27/105 ; H01L27/115 ; H01L29/78 ; H01L29/788 ; H01L29/792 ; H01L29/94 ; H01L31/072
摘要:
Provided is a high voltage transistor in a flash memory device comprising: a source/drain junction of a DDD structure consisting of a high-concentration impurity region and a low-concentration impurity region surrounding the high-concentration impurity region, the high-concentration impurity region being formed in parallel with a gate electrode at a distance spaced by a location in which a contact hole is formed, and having a rectangular shape whose width is the same as or wider than that of the contact hole and whose length is the same as or narrower than that of an active region through which the gate electrode passes. Accordingly, a current density to pass the gate electrode neighboring the contact hole portion and a current density to pass the gate electrode at a portion where the contact hole cannot be formed become uniform. A uniform and constant saturation current can be obtained regardless of the number of the contact hole.
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