发明申请
- 专利标题: Cavity-less film bulk acoustic resonator (FBAR) devices
- 专利标题(中): 无腔膜体声共振器(FBAR)器件
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申请号: US10969744申请日: 2004-10-19
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公开(公告)号: US20050104690A1公开(公告)日: 2005-05-19
- 发明人: John Larson , Stephen Ellis , Paul Bradley , Yury Oshmyansky
- 申请人: John Larson , Stephen Ellis , Paul Bradley , Yury Oshmyansky
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/13 ; H03H9/58 ; H03H9/60 ; H03H9/56
摘要:
The film bulk acoustic resonator (FBAR) device comprises a substrate, an acoustic Bragg reflector over the substrate, a piezoelectric element over the acoustic Bragg reflector, and a remote-side electrode over the piezoelectric element. The acoustic Bragg reflector comprises a metal Bragg layer juxtaposed with a plastic Bragg layer. The large ratio between the acoustic impedances of the plastic material of the plastic Bragg layer and the metal of the metal Bragg layer provides sufficient acoustic isolation between the FBAR and the substrate for the frequency response of the FBAR device to exhibit minor, if any, spurious artifacts arising from undesirable acoustic coupling between the FBAR and the substrate.
公开/授权文献
- US07332985B2 Cavity-less film bulk acoustic resonator (FBAR) devices 公开/授权日:2008-02-19
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