A new route has been found leading to the formation of pentafluorosulfuranyl arylenes. In its broadest aspect the process comprises: effecting dehydrohalogenation or dehydrogenation of a pentafluorosulfuranyl compound represented by either of the structures: wherein R1 is H, C1-10 alkyl, C1-10 alkoxy, C1-10 thionyl. C1-10 alkyl ether, list more, R2, R4 and R5 are H and R3 is H repeated R1 to form the pentafluorosufuranyl arylene represented by the structures: wherein R1-R5 are as represented in compound represented by the structures A and B.