发明申请
- 专利标题: Wafer container with door actuated wafer restraint
- 专利标题(中): 具有门驱动晶片约束的晶片容器
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申请号: US10989232申请日: 2004-11-15
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公开(公告)号: US20050109667A1公开(公告)日: 2005-05-26
- 发明人: John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
- 申请人: John Burns , Matthew Fuller , Jeffery King , Martin Forbes , Mark Smith
- 主分类号: B65D51/26
- IPC分类号: B65D51/26 ; H01L21/673 ; B65D85/30
摘要:
A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.
公开/授权文献
- US07100772B2 Wafer container with door actuated wafer restraint 公开/授权日:2006-09-05
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