发明申请
US20050111725A1 Surface scan measuring device and method of forming compensation table for scanning probe 有权
表面扫描测量装置及形成扫描探头补偿台的方法

Surface scan measuring device and method of forming compensation table for scanning probe
摘要:
A measuring system includes a coordinate measuring machine for driving a scanning probe and a host computer. The host computer includes a compensation table (53) and a profile analysis unit (54). The compensation table stores, as compensation data, compensation coefficients to correct counter values of a probe counter (415), and compensation radiuses “r” to the workpiece surface concerning central coordinate values of a contact portion, for respective contact directions. The profile analysis unit has a contact direction calculation unit (542), a compensation data selection unit (543), a compensation calculation unit (544). The contact direction calculation unit calculates the contact direction along which the scanning probe comes into contact with a workpiece W, and the compensation data selection unit selects compensation data set up in the compensation table based on thus calculated contact direction.
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