发明申请
- 专利标题: Surface scan measuring device and method of forming compensation table for scanning probe
- 专利标题(中): 表面扫描测量装置及形成扫描探头补偿台的方法
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申请号: US10995730申请日: 2004-11-22
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公开(公告)号: US20050111725A1公开(公告)日: 2005-05-26
- 发明人: Takashi Noda , Katsuyuki Ogura
- 申请人: Takashi Noda , Katsuyuki Ogura
- 申请人地址: JP Kawasaki-shi
- 专利权人: MITUTOYO CORPORATION
- 当前专利权人: MITUTOYO CORPORATION
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2003-393677 20031125
- 主分类号: G01B5/012
- IPC分类号: G01B5/012 ; G01B5/20 ; G01B21/04 ; G06K9/00
摘要:
A measuring system includes a coordinate measuring machine for driving a scanning probe and a host computer. The host computer includes a compensation table (53) and a profile analysis unit (54). The compensation table stores, as compensation data, compensation coefficients to correct counter values of a probe counter (415), and compensation radiuses “r” to the workpiece surface concerning central coordinate values of a contact portion, for respective contact directions. The profile analysis unit has a contact direction calculation unit (542), a compensation data selection unit (543), a compensation calculation unit (544). The contact direction calculation unit calculates the contact direction along which the scanning probe comes into contact with a workpiece W, and the compensation data selection unit selects compensation data set up in the compensation table based on thus calculated contact direction.
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