发明申请
US20050117203A1 Method for producing an optical element from a quartz substrate
审中-公开
从石英基板制造光学元件的方法
- 专利标题： Method for producing an optical element from a quartz substrate
- 专利标题（中）： 从石英基板制造光学元件的方法
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申请号： US10985488申请日： 2004-11-10
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公开(公告)号： US20050117203A1公开(公告)日： 2005-06-02
- 发明人: Nils Dieckmann , Kirstin Becker , Dieter Bader
- 申请人： Nils Dieckmann , Kirstin Becker , Dieter Bader
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT AG
- 当前专利权人： Carl Zeiss SMT AG
- 当前专利权人地址： DE Oberkochen
- 优先权： DE10220045.9 20020504
- 主分类号： G02B5/18
- IPC分类号： G02B5/18 ; G03F7/20 ; H01L21/027 ; G03B27/54 ; G02B1/00 ; G02B5/02 ; G02B13/20 ; G02B27/42 ; G03B27/72 ; G03F7/40
摘要：
In a method for producing an optical element from a quartz substrate for illumination systems with illumination sources which emit beams of wavelength 157 nm or shorter, the quartz substrate is joined to a support body on at least one side. Subsequently, from the quartz substrate material is removed to a desired value with a thickness in the μ region. The optical element can be a diffractive optical element or diffusion plate.
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