发明申请
US20050121145A1 Thermal processing system with cross flow injection system with rotatable injectors
审中-公开
具有可旋转注射器的交叉流注射系统的热处理系统
- 专利标题： Thermal processing system with cross flow injection system with rotatable injectors
- 专利标题（中）： 具有可旋转注射器的交叉流注射系统的热处理系统
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申请号： US10946849申请日： 2004-09-21
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公开(公告)号： US20050121145A1公开(公告)日： 2005-06-09
- 发明人: Dale Du Bois , Cole Porter , Robert Herring
- 申请人： Dale Du Bois , Cole Porter , Robert Herring
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C16/458 ; C23F1/00 ; H01L20060101
摘要：
An apparatus is provided for thermally processing substrates held in a carrier. The apparatus includes an injection system which provides for selectable injection of gases to the process chamber. The injection system comprises one or more elongated injection tubes having a plurality of injection ports or orifices distributed in the tubes for directing flow of reactant and other gases across the surface of each substrate. The elongated injection tubes are rotatable about an axis in 360 degrees.
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