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发明申请
US20050125089A1 Method and apparatus for integrating large and small lot electronic device fabrication facilities 有权
集成大型和小型电子设备制造设备的方法和设备

Method and apparatus for integrating large and small lot electronic device fabrication facilities
摘要：
In at least one aspect, the invention provides an electronic device fabrication facility (Fab) that uses small lot carriers that may be transparently integrated into an existing Fab that uses large lot carriers. A manufacturing execution system (MES) may interact with the inventive small lot Fab as if the small lot Fab is any other Fab component in an existing large lot Fab without requiring knowledge of how to control small lot Fab components (e.g., beyond specifying a processing recipe). A small lot Fab according to the present invention may encapsulate the small lot Fab's internal use of small lot components and present itself to a large lot Fab's MES as if the small lot Fab is a component that uses large lot carriers.
摘要（中）：

在至少一个方面，本发明提供一种电子设备制造设施（Fab），其使用可以透明地集成到使用大批量载体的现有Fab中的小批量载体。 制造执行系统（MES）可以与本发明的小批量Fab相互作用，好像小批量Fab是现有大批量Fab中的任何其他Fab组件，而不需要知道如何控制小批量Fab组件（例如，超出指定处理 食谱）。 根据本发明的小批量Fab可以封装小批量Fab的小批量部件的内部使用，并且将其自身呈现给大量的Fab的MES，就好像小批量Fab是使用大批量载体的组件一样。

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