发明申请
- 专利标题： Retaining ring with slurry transport grooves
- 专利标题（中）： 带浆料输送槽的保持环
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申请号： US10732966申请日： 2003-12-10
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公开(公告)号： US20050126708A1公开(公告)日： 2005-06-16
- 发明人: Hung Chen , Steven Zuniga
- 申请人： Hung Chen , Steven Zuniga
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 主分类号： B24B37/04
- IPC分类号： B24B37/04 ; B24B41/06 ; H01L21/306
摘要：
A retaining ring for chemical mechanical polishing has a generally annular body with a top surface, a bottom surface, an inner diameter surface, and an outer diameter surface. The bottom surface includes a plurality of channels, each channel extending from the inner diameter surface to the outer diameter surface and having a rounded ceiling.
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