发明申请
- 专利标题: Wrap-around gate field effect transistor
- 专利标题(中): 环绕栅场效应晶体管
-
申请号: US10732958申请日: 2003-12-11
-
公开(公告)号: US20050127466A1公开(公告)日: 2005-06-16
- 发明人: Toshiharu Furukawa , Mark Hakey , David Horak , Charles Koburger , Peter Mitchell
- 申请人: Toshiharu Furukawa , Mark Hakey , David Horak , Charles Koburger , Peter Mitchell
- 申请人地址: US NY ARMONK
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY ARMONK
- 主分类号: H01L21/334
- IPC分类号: H01L21/334 ; H01L21/336 ; H01L29/41 ; H01L29/423 ; H01L29/49 ; H01L29/786 ; H01L21/76 ; H01L29/00
摘要:
A field effect transistor is formed having wrap-around, vertically-aligned, dual gate electrodes. Starting with an silicon-on-insulator (SOI) structure having a buried silicon island, a vertical reference edge is defined, by creating a cavity within the SOI structure, and used during two etch-back steps that can be reliably performed. The first etch-back removes a portion of an oxide layer for a first distance over which a gate conductor material is then applied. The second etch-back removes a portion of the gate conductor material for a second distance. The difference between the first and second distances defines the gate length of the eventual device. After stripping away the oxide layers, a vertical gate electrode is revealed that surrounds the buried silicon island on all four side surfaces.
公开/授权文献
- US07271444B2 Wrap-around gate field effect transistor 公开/授权日:2007-09-18
信息查询
IPC分类: