发明申请
US20050128589A1 Phase-compensated cube corner in laser interferometry 有权
激光干涉测量中的相位补偿立方角

Phase-compensated cube corner in laser interferometry
摘要:
A phase-compensating cube corner retroreflector includes three rear reflecting surfaces. The first and the third rear reflecting surfaces can be coated with a phase-compensating film stack that induces 2nπ phase difference upon reflection, where n is an integer including 0. Alternatively, all three rear reflecting surfaces can be coated with a phase-compensating film stack that induces nπ phase difference when handling linearly polarized light, or 2nπ phase difference when handling linearly or circularly polarized light. So coated, the phase-compensating cube corner preserves the polarization orientation and ellipticity of the incident light. Such a phase-compensating cube corner can be used to improve the accuracy of distance-measuring interferometers. The cube corner directs light to and from other optical elements, including a polarizing beam-splitters, mirrors, and quarter-wave plates.
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