发明申请
- 专利标题: Method and apparatus for polishing a substrate
- 专利标题(中): 抛光基板的方法和装置
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申请号: US11045089申请日: 2005-01-31
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公开(公告)号: US20050130386A1公开(公告)日: 2005-06-16
- 发明人: Itsuro Watanabe , Takashi Kubo
- 申请人: Itsuro Watanabe , Takashi Kubo
- 申请人地址: JP Tokyo
- 专利权人: ASAHI GLASS COMPANY LIMITED
- 当前专利权人: ASAHI GLASS COMPANY LIMITED
- 当前专利权人地址: JP Tokyo
- 优先权: JP2002-223001 20020731
- 主分类号: G02F1/1333
- IPC分类号: G02F1/1333 ; B24B37/04 ; B24B7/00 ; B24B9/00 ; H01L21/76
摘要:
The present invention is to provide a method and device for polishing a glass substrate, suitable for polishing a large-sized glass substrate. The device for polishing a substrate is adapted so that a substrate is attached to a film stretched on a frame; the frame is installed on a carrier; the carrier and a polishing surface-plate are brought closer relative to each other to polish a surface to be polished of the substrate attached to the film by pressing the substrate to the polishing surface-plate; the frame is removed from the carrier after the completion of the polishing, and the polished substrate is removed from the frame.
公开/授权文献
- US07115022B2 Method and apparatus for polishing a substrate 公开/授权日:2006-10-03
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