发明申请
- 专利标题: Semiconductor local interconnect and contact
- 专利标题(中): 半导体局部互连和接触
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申请号: US11045202申请日: 2005-01-27
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公开(公告)号: US20050130402A1公开(公告)日: 2005-06-16
- 发明人: Yelehanka Ramachandramurthy Pradeep , Tong Chen , Zhi Han , Zhen Zheng , Kelvin Ong , Tian Gu , Syn Cheah
- 申请人: Yelehanka Ramachandramurthy Pradeep , Tong Chen , Zhi Han , Zhen Zheng , Kelvin Ong , Tian Gu , Syn Cheah
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/60 ; H01L21/768 ; H01L21/8234 ; H01L21/4763 ; H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
An integrated circuit is provided. A gate dielectric and a gate are provided respectively on and over a semiconductor substrate. A junction is formed adjacent the gate dielectric and a shaped spacer is formed around the gate. A spacer is formed under the shaped spacer and a liner is formed under the spacer. A first dielectric layer is formed over the semiconductor substrate, the shaped spacer, the spacer, the liner, and the gate. A second dielectric layer is formed over the first dielectric layer. A local interconnect opening is formed in the second dielectric layer down to the first dielectric layer. The local interconnect opening in the first dielectric layer is opened to expose the junction in the semiconductor substrate and the first gate. The local interconnect openings in the first and second dielectric layers are filled with a conductive material.
公开/授权文献
- US07119005B2 Semiconductor local interconnect and contact 公开/授权日:2006-10-10
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