发明申请
- 专利标题： Relative pressure sensor
- 专利标题（中）： 相对压力传感器
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申请号： US10500153申请日： 2002-12-28
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公开(公告)号： US20050139009A1公开(公告)日： 2005-06-30
- 发明人: Karl Flogel , Sergej Lopatiin , Elke Schmidt , Thomas Uehlin , Olaf Textor , Michael Hugel
- 申请人： Karl Flogel , Sergej Lopatiin , Elke Schmidt , Thomas Uehlin , Olaf Textor , Michael Hugel
- 优先权： DE10200780.2 20020110
- 国际申请： PCT/EP02/14787 WO 20021228
- 主分类号： G01L9/00
- IPC分类号： G01L9/00 ; G01L13/02 ; G01L19/04 ; G01L19/06
摘要：
A pressure sensor for measuring a pressure difference between a pressure being measured and the ambient atmospheric pressure surrounding the pressure sensor, including a platform and a membrane loadable with a pressure being measured. The membrane is secured at its edge to the platform, with a pressure chamber thus being formed between the platform and the measuring membrane. The pressure chamber communicates over a reference air path with the atmosphere, with the reference air path being a winding path.
公开/授权文献
- US07140256B2 Relative pressure sensor 公开/授权日：2006-11-28
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