发明申请
- 专利标题: Self-sustaining center-anchor microelectromechanical switch and method of manufacturing the same
- 专利标题(中): 自支撑中心锚微机电开关及其制造方法
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申请号: US10800767申请日: 2004-03-16
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公开(公告)号: US20050140478A1公开(公告)日: 2005-06-30
- 发明人: Jae Lee , Sung Kang , Youn Kim
- 申请人: Jae Lee , Sung Kang , Youn Kim
- 优先权: KR2003-97045 20031226
- 主分类号: H01H51/22
- IPC分类号: H01H51/22 ; H01H59/00 ; H01P1/12
摘要:
Provided is a self-sustaining center-anchor microelectromechanical switch driven by an electrostatic force used for controlling a signal transmission in an electronic system, which can suppress deformation of a movement plane generated during manufacturing and operation process by inserting the self-sustaining center-anchor, and improve a ground line contact phenomenon of an upper electrode, thereby enhancing reliability and signal isolation feature while maintaining an existing insertion loss feature compared to the microelectromechanical switch of the prior art.
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