发明申请
- 专利标题： Coherent beam device for observing and measuring sample
- 专利标题（中）： 用于观察和测量样品的相干光束装置
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申请号： US10485541申请日： 2002-08-02
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公开(公告)号： US20050146730A1公开(公告)日： 2005-07-07
- 发明人: Junji Endo , Chen Jun
- 申请人： Junji Endo , Chen Jun
- 优先权： JP2001-234878 20010802
- 国际申请： PCT/JP02/07851 WO 20020802
- 主分类号： G01B9/02
- IPC分类号： G01B9/02
摘要：
In an interferometric device using a coherent beam and an image pickup camera, a protective glass for the detector surface is needed on the incident side of the pickup unit of the image pickup camera, and this gives rise to interference fringes which constitute noise. To solve this problem, a dustproof container is configured also to cover an imaging lens system arranged on the incident side of the pickup unit of the image pickup camera, and the pickup unit of the image pickup camera is arranged in this container. By assigning the function of the protective glass for the detector surface in the conventional configuration to the imaging lens system, the protective glass is made unnecessary.
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