发明申请
- 专利标题: Non-contact surface configuration measuring apparatus and method thereof
- 专利标题(中): 非接触面构成测定装置及其方法
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申请号: US11033133申请日: 2005-01-12
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公开(公告)号: US20050151978A1公开(公告)日: 2005-07-14
- 发明人: Katsushige Nakamura , Katsuhiro Miura , Hideo Kotajima
- 申请人: Katsushige Nakamura , Katsuhiro Miura , Hideo Kotajima
- 优先权: JP2004-005389 20040113
- 主分类号: G01B11/24
- IPC分类号: G01B11/24 ; G01B11/255 ; G01B21/20 ; G02B21/00
摘要:
A non-contact surface configuration measuring method is provided which allows for accurate measurement of a surface which is at a steep angle to a laser probe. Specific areas including parts inclined ±30° or more from an optimum measurement state relative to the laser probe are measured after a workpiece is rotated such that the surface within the specific areas is less than ±30°. Therefore, accurately measured data on the specific areas can be obtained even in a different coordinate system from that of a general area.