Invention Application
- Patent Title: Negative poisson's ratio material-containing CMP polishing pad
- Patent Title (中): 负泊松比含材料的CMP抛光垫
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Application No.: US10754390Application Date: 2004-01-09
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Publication No.: US20050153634A1Publication Date: 2005-07-14
- Inventor: Abaneshwar Prasad , Ronald Myers
- Applicant: Abaneshwar Prasad , Ronald Myers
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Main IPC: B24B37/04
- IPC: B24B37/04 ; B24D13/14 ; B24B1/00

Abstract:
The invention is directed to a chemical-mechanical polishing pad comprising a porous polymeric material, wherein the porous polymeric material has a Poisson's ratio less than 0. The invention further provides a method of polishing a workpiece comprising (i) providing a workpiece to be polished, (ii) contacting the workpiece with a chemical-mechanical polishing system comprising the polishing pad of the invention, and (iii) abrading at least a portion of the surface of the workpiece with the polishing system to polish the workpiece.
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