发明申请
- 专利标题: Ink-jet head production method and ink-jet recorder
- 专利标题(中): 喷墨头生产方法和喷墨记录仪
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申请号: US10506750申请日: 2003-12-08
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公开(公告)号: US20050168535A1公开(公告)日: 2005-08-04
- 发明人: Taku Hirasawa , Akiko Murata , Eiji Fujii , Hideo Torii , Tohru Nakagawa
- 申请人: Taku Hirasawa , Akiko Murata , Eiji Fujii , Hideo Torii , Tohru Nakagawa
- 申请人地址: JP saka 571-8501
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JP saka 571-8501
- 优先权: JP2002-357583 20021210
- 国际申请: PCT/JP03/15643 WO 20031208
- 主分类号: B41J2/16
- IPC分类号: B41J2/16 ; B41J2/045
摘要:
First, a first electrode layer 4, a piezoelectric layer 5, a second electrode layer 6 and an oscillation layer 7 are stacked in this order over one surface of a silicon substrate 1. Next, an ink chamber partition 8 and a nozzle plate 11 are stacked over the oscillation layer 7. Subsequently, the silicon substrate 1 is ground away to a predetermined thickness from a surface thereof opposite to the first electrode layer 4, and then a remnant silicon substrate 13 is dry etched away. Thereafter, the first electrode layer 4 is patterned to form a plurality of inkjet mechanisms 2, 2, . . . . Finally, the plurality of inkjet mechanisms 2, 2, . . . are divided to simultaneously fabricate a plurality of inkjet heads 3, 3, . . . .
公开/授权文献
- US07131173B2 Method of fabricating an inkjet head 公开/授权日:2006-11-07