发明申请
- 专利标题: Auto calibration of attraction-only type actuator commutations
- 专利标题(中): 仅吸引型执行器换向的自动校准
-
申请号: US10775720申请日: 2004-02-09
-
公开(公告)号: US20050173992A1公开(公告)日: 2005-08-11
- 发明人: Pai Yang , Tim Teng , Kazuhiro Hirano , Bausan Yuan
- 申请人: Pai Yang , Tim Teng , Kazuhiro Hirano , Bausan Yuan
- 主分类号: H02K41/03
- IPC分类号: H02K41/03 ; H02P25/06 ; H02K41/00 ; H02P3/00 ; H02P5/00
摘要:
A stage assembly (220) for moving a device (200) includes a stage (208), an attraction-only type actuator pair (426) that moves the stage (208), and a control system (24). In one embodiment, the actuator pair (426) includes a first electromagnet (436F), a first conductor (438F) and a first target (440F) having a first target surface (442F). The actuator pair also includes a second electromagnet (436S), a second conductor (438S) and a second target (440S) having a second target surface (442S). The first electromagnet (436F) is positioned at a first angle θ1 relative to a first target surface (442F) and the second electromagnet (436S) is positioned at a second angle θ2 relative to the second target surface (442S). The control system (24) directs a first current to one or more of the electromagnets based on at least one of the angles θ1, θ2. Further, one or more electromagnets (436) can include a first measurement point and a second measurement point. The control system (24) can direct current to the actuator pair (426) based on the relative distance between the first and second measurement points and the corresponding target surface (442).
公开/授权文献
信息查询