To provide a manufacturing method of an electro-optical device capable of effectively forming self-emitting elements in a large substrate on which a plurality of small substrates are arranged in a plane, without increasing the size of a manufacturing apparatus, the electro-optical device manufactured by the method, and an electronic apparatus equipped with the same. When manufacturing an organic EL display device by bonding a plurality of small substrates, processes required for a laser annealing technique and a photolithography technique, such as a process of forming TFTs and a process of forming pixel electrode, are performed before a process of bonding the small substrates to the large substrate, and organic EL elements are formed by an inkjet method after the bonding process. Further, a protective film is formed on the small substrates while the organic EL display elements are being formed.