发明申请
- 专利标题: Liquid droplet ejection apparatus, method of manufacturing electro-optical device, electro-optical device, and electronic apparatus
- 专利标题(中): 液滴喷射装置,电光装置的制造方法,电光装置和电子装置
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申请号: US11055379申请日: 2005-02-10
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公开(公告)号: US20050190225A1公开(公告)日: 2005-09-01
- 发明人: Kenji Sakamoto
- 申请人: Kenji Sakamoto
- 优先权: JP2004-036760 20040213; JP2004-299439 20041013
- 主分类号: B41J2/18
- IPC分类号: B41J2/18 ; B05C5/00 ; B41J2/01 ; B41J2/165 ; B41J2/185 ; G02B5/20 ; G02F1/133 ; H01L51/00 ; H04M1/02 ; H05B33/10
摘要:
A function liquid droplet ejection apparatus includes an imaging apparatus for performing imaging on a workpiece with a function liquid droplet ejection head and a maintenance apparatus for performing maintenance of the function liquid droplet ejection head. The imaging apparatus includes: an X-axis table having the workpiece mounted thereon and moving the workpiece in the X-axis direction; a plurality of carriage units having the function liquid droplet ejection head mounted on a carriage; and a Y-axis table moving the plurality of, carriage units between an imaging area and a maintenance area. The Y-axis table is capable of moving the plurality of carriage units independently.
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