发明申请
US20050190225A1 Liquid droplet ejection apparatus, method of manufacturing electro-optical device, electro-optical device, and electronic apparatus 审中-公开
液滴喷射装置,电光装置的制造方法,电光装置和电子装置

Liquid droplet ejection apparatus, method of manufacturing electro-optical device, electro-optical device, and electronic apparatus
摘要:
A function liquid droplet ejection apparatus includes an imaging apparatus for performing imaging on a workpiece with a function liquid droplet ejection head and a maintenance apparatus for performing maintenance of the function liquid droplet ejection head. The imaging apparatus includes: an X-axis table having the workpiece mounted thereon and moving the workpiece in the X-axis direction; a plurality of carriage units having the function liquid droplet ejection head mounted on a carriage; and a Y-axis table moving the plurality of, carriage units between an imaging area and a maintenance area. The Y-axis table is capable of moving the plurality of carriage units independently.
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