发明申请
US20050191565A1 In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles
有权
极紫外（EUV）光罩的工具和工具外保护
- 专利标题： In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles
- 专利标题（中）： 极紫外（EUV）光罩的工具和工具外保护
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申请号： US10789670申请日： 2004-02-27
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公开(公告)号： US20050191565A1公开(公告)日： 2005-09-01
- 发明人: Arun Ramamoorthy , Robert Bristol
- 申请人： Arun Ramamoorthy , Robert Bristol
- 主分类号： G03F1/14
- IPC分类号： G03F1/14 ; G03F7/20 ; G03F9/00
摘要：
A reticle carrier for an Extreme Ultraviolet (EUV) reticle may include nested grids of electret fibers to provide active protection from contamination without a power supply. The reticle carrier may include in-line sensors for in-situ monitoring of contamination. Grids of electret fibers may also be used in an EUV pellicle.
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