发明申请
US20050191769A1 System, method and apparatus for automatic control of an RF generator for maximum efficiency
有权
用于自动控制RF发生器以最大效率的系统，方法和装置
- 专利标题： System, method and apparatus for automatic control of an RF generator for maximum efficiency
- 专利标题（中）： 用于自动控制RF发生器以最大效率的系统，方法和装置
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申请号： US11112334申请日： 2005-04-22
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公开(公告)号： US20050191769A1公开(公告)日： 2005-09-01
- 发明人: Thomas Anderson , Andras Kuthi
- 申请人： Thomas Anderson , Andras Kuthi
- 申请人地址： US CA FREMONT
- 专利权人： LAM RESEARCH CORPORATION
- 当前专利权人： LAM RESEARCH CORPORATION
- 当前专利权人地址： US CA FREMONT
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; B08B6/00 ; C25F5/00
摘要：
A method of dynamically adjusting a RF generator to an instantaneous resonant frequency of a transducer includes providing an RF input signal from an oscillator to the RF generator and measuring a supply voltage applied to the RF generator. A peak voltage in the RF generator is also measured. A frequency control signal is produced when the peak voltage is not equal to a selected ratio of the supply voltage. The frequency control signal is applied to a frequency control input of the oscillator.
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