- 专利标题: In-situ metalization monitoring using eddy current measurements during the process for removing the film
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申请号: US11115835申请日: 2005-04-26
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公开(公告)号: US20050194971A1公开(公告)日: 2005-09-08
- 发明人: Kurt Lehman , Shing Lee , Walter Johnson , John Fielden
- 申请人: Kurt Lehman , Shing Lee , Walter Johnson , John Fielden
- 专利权人: KLA-TENCOR CORPORATION
- 当前专利权人: KLA-TENCOR CORPORATION
- 主分类号: G01N27/72
- IPC分类号: G01N27/72 ; G01B7/06
摘要:
A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.
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