Invention Application
- Patent Title: Microelectromechanical system pressure sensor and method for making and using
- Patent Title (中): 微机电系统压力传感器及其制作与使用方法
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Application No.: US10799053Application Date: 2004-03-12
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Publication No.: US20050199069A1Publication Date: 2005-09-15
- Inventor: Jeffrey Fortin , Kuna Kishore , Kanakasabapathi Subramanian
- Applicant: Jeffrey Fortin , Kuna Kishore , Kanakasabapathi Subramanian
- Main IPC: G01L1/14
- IPC: G01L1/14 ; G01L9/00 ; G01M9/00
Abstract:
According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.
Public/Granted literature
- US07114397B2 Microelectromechanical system pressure sensor and method for making and using Public/Granted day:2006-10-03
Information query
