发明申请
- 专利标题: Measurement probe and using method for the same
- 专利标题(中): 测量探头和使用方法相同
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申请号: US11014947申请日: 2004-12-20
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公开(公告)号: US20050204573A1公开(公告)日: 2005-09-22
- 发明人: Takaaki Kassai , Keishi Kubo , Masateru Doi , Hiroyuki Mochizuki , Keiichi Yosizumi
- 申请人: Takaaki Kassai , Keishi Kubo , Masateru Doi , Hiroyuki Mochizuki , Keiichi Yosizumi
- 优先权: JP2003-426025 20031224
- 主分类号: G01B21/00
- IPC分类号: G01B21/00 ; G01B3/00 ; G01B5/00 ; G01B5/012 ; G01B7/00
摘要:
A measuring probe for obtaining positional information on a measuring target face has: a movable member having a contact portion which is formed in its top and comes into contact with the measuring target face and a reflecting plane formed on its base end for reflecting a measuring light beam; a magnetic substance mounted on the movable member; a fixed member disposed in a fixed state; a bearing provided on the fixed member for supporting the movable member movably in axis line direction; and a magnetic force generating portion provided on the fixed member for generating force acting upon the magnetic substance to move the movable member in the axis line direction. The movable member is formed from a nonmagnetic material, and the bearing and the fixed member are formed from a magnetic material.
公开/授权文献
- US07065893B2 Measurement probe and using method for the same 公开/授权日:2006-06-27
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