发明申请
- 专利标题: Device and method for manufacturing carbon nanotube
- 专利标题(中): 碳纳米管制造装置及方法
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申请号: US11037253申请日: 2005-01-19
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公开(公告)号: US20050207965A1公开(公告)日: 2005-09-22
- 发明人: Isao Shimoyama , Shigeo Maruyama , Kiyoshi Matsumoto , Kazunori Hoshino , Yoichi Murakami
- 申请人: Isao Shimoyama , Shigeo Maruyama , Kiyoshi Matsumoto , Kazunori Hoshino , Yoichi Murakami
- 申请人地址: JP Tokyo
- 专利权人: THE UNIVERSITY OF TOKYO
- 当前专利权人: THE UNIVERSITY OF TOKYO
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-15,962 20040123
- 主分类号: C01B31/02
- IPC分类号: C01B31/02 ; D01F9/12 ; D01F9/127
摘要:
There is provided a device for manufacturing carbon nanotube. The devices has a chamber support part for supporting a chamber which contains a plurality of microstructures, each of which is separated from each other by an interval; a gas providing part, connected to the chamber, for flowing at least one reactant gas, including raw material gas for manufacturing carbon nanotubes, through the chamber; a measurement part for measuring a change in physical properties of at least one of the plurality of microstructures by using detecting part; and a control part for controlling the gas providing part based on the measured change in physical properties.
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