发明申请
- 专利标题: Method for producing microhole structures
- 专利标题(中): 微孔结构的制造方法
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申请号: US10512601申请日: 2003-04-25
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公开(公告)号: US20050214692A1公开(公告)日: 2005-09-29
- 发明人: Andreas Gombert , Volkmar Boerner , Josef Robert , Ilka Gehrke , Benedikt Blasi , Michael Niggemann , Christian Schlemmer
- 申请人: Andreas Gombert , Volkmar Boerner , Josef Robert , Ilka Gehrke , Benedikt Blasi , Michael Niggemann , Christian Schlemmer
- 优先权: DE10219584.6 20020426
- 国际申请: PCT/EP03/04321 WO 20030425
- 主分类号: B01D67/00
- IPC分类号: B01D67/00 ; B01D69/10 ; B01D71/02 ; G03F7/00
摘要:
The invention relates to a novel method for producing microhole structures. According to said method, the material used to produce said microhole structures is applied to a substrate surface provided with a relief structure, by means of an angular coating process. In order to achieve the desired pattern of holes, the relief structure has a continuous network of first surface elements and second surface elements located thereinbetween, the local surface normal vectors of the first surface elements forming a small angle with the unit vector, and the local surface normal vectors of the second surface elements forming a small angle with the direction vector of the coating.
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