发明申请
- 专利标题: Thermal flux processing by scanning a focused line beam
- 专利标题(中): 通过扫描聚焦线束进行热通量处理
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申请号: US11079785申请日: 2005-03-14
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公开(公告)号: US20050218124A1公开(公告)日: 2005-10-06
- 发明人: Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
- 申请人: Dean Jennings , Mark Yam , Abhilash Mayur , Vernon Behrens , Paul O'Brien , Leonid Tertitski , Alexander Goldin
- 主分类号: B23K26/03
- IPC分类号: B23K26/03 ; B23K26/073 ; B23K26/42 ; C23C8/00 ; C23C8/10 ; C23C8/22 ; C23C16/04 ; C23C16/48 ; H01L21/20 ; B23K26/06
摘要:
The thermal processing device includes a stage, a continuous wave electromagnetic radiation source, a series of lenses, a translation mechanism, a detection module, a three-dimensional auto-focus, and a computer system. The stage is configured to receive a substrate thereon. The continuous wave electromagnetic radiation source is disposed adjacent the stage, and is configured to emit continuous wave electromagnetic radiation along a path towards the substrate. The series of lenses is disposed between the continuous wave electromagnetic radiation source and the stage, and are configured to condense the continuous wave electromagnetic radiation into a line of continuous wave electromagnetic radiation on a surface of the substrate. The translation mechanism is configured to translate the stage and the line of continuous wave electromagnetic radiation relative to one another. The detection module is positioned within the path, and is configured to detect continuous wave electromagnetic radiation.
公开/授权文献
- US08178819B2 Thermal flux processing by scanning a focused line beam 公开/授权日:2012-05-15