发明申请
- 专利标题: CHARGE-TRAPPING MEMORY CELL ARRAY AND METHOD FOR PRODUCTION
- 专利标题(中): 电荷捕获存储单元阵列和生产方法
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申请号: US10815223申请日: 2004-03-31
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公开(公告)号: US20050227426A1公开(公告)日: 2005-10-13
- 发明人: Joachim Deppe , Josef Willer
- 申请人: Joachim Deppe , Josef Willer
- 主分类号: H01L21/8246
- IPC分类号: H01L21/8246 ; H01L27/115 ; H01L21/8238
摘要:
In a memory cell array comprising charge-trapping memory cells, local interconnects along the direction of the wordlines for connecting source/drain regions of adjacent memory cells to bitlines are formed by selective deposition of silicon or polysilicon bridges at sidewalls of the semiconductor material within upper recesses in the dielectric material of shallow trench isolations running across the wordlines.
公开/授权文献
- US06972226B2 Charge-trapping memory cell array and method for production 公开/授权日:2005-12-06
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