发明申请
- 专利标题： Resistive heaters and uses thereof
- 专利标题（中）： 电阻加热器及其用途
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申请号： US11152862申请日： 2005-06-15
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公开(公告)号： US20050230378A1公开(公告)日： 2005-10-20
- 发明人: Richard Abbott , Gary Magnant , William Glenn
- 申请人： Richard Abbott , Gary Magnant , William Glenn
- 主分类号： H05B3/20
- IPC分类号： H05B3/20 ; B21B27/08 ; B22C9/06 ; B22D17/22 ; B29C45/73 ; C23C4/02 ; C23C4/06 ; C23C4/10 ; C23C4/12 ; C23C16/46 ; F26B13/04 ; F27D1/16 ; H01L21/00 ; H01L21/31 ; H05B3/00 ; H05B3/10 ; H05B3/12 ; H05B3/14 ; H05B3/68 ; H05B3/16
摘要：
The present invention features a metallic resistive heater and uses thereof. The resistive heater includes a metallic component that is electrically conductive (i.e., has low resistivity) and an oxide, nitride, carbide, and/or boride derivative of the metallic component that is electrically insulating (i.e., has high resistivity). The resistivity is controlled in part by controlling the amount of oxide, nitride, carbide, and boride formation during the deposition of the metallic component and the derivative.
公开/授权文献
- US07176420B2 Resistive heaters and uses thereof 公开/授权日：2007-02-13
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