发明申请
- 专利标题: Method for reciprocating a workpiece through an ion beam
- 专利标题(中): 通过离子束使工件往复运动的方法
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申请号: US11099062申请日: 2005-04-05
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公开(公告)号: US20050232749A1公开(公告)日: 2005-10-20
- 发明人: John Vanderpot , John Pollock , Donald Berrian
- 申请人: John Vanderpot , John Pollock , Donald Berrian
- 主分类号: A61N5/00
- IPC分类号: A61N5/00 ; B65H1/00 ; H01J37/317 ; H01L21/00 ; H01L21/687
摘要:
A method for reciprocally transporting a workpiece on a scan arm through an ion beam is provided, wherein the scan arm is operably coupled to a motor comprising a rotor and stator that are individually rotatable about a first axis. An electromagnetic force applied between the rotor and stator rotates the rotor about the first axis and translates the workpiece through the ion beam along a first scan path. A position of the workpiece is sensed and the electromagnetic force between the rotor and stator is controlled in order to reverse the direction of motion of the workpiece along the first scan path, and wherein the control is based, at least in part, on the sensed position of the workpiece. The stator further rotates about the first axis in reaction to the rotation of the rotor, particularly in the reversal of direction of motion of the workpiece, thus acting as a reaction mass to the rotation of one or more of the rotor, scan arm, and workpiece.
公开/授权文献
- US07141809B2 Method for reciprocating a workpiece through an ion beam 公开/授权日:2006-11-28
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