发明申请
US20050233122A1 Manufacturing method of laminated substrate, and manufacturing apparatus of semiconductor device for module and laminated substrate for use therein
审中-公开
层叠基板的制造方法以及用于其中的模块和层压基板的半导体装置的制造装置
- 专利标题: Manufacturing method of laminated substrate, and manufacturing apparatus of semiconductor device for module and laminated substrate for use therein
- 专利标题(中): 层叠基板的制造方法以及用于其中的模块和层压基板的半导体装置的制造装置
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申请号: US11107852申请日: 2005-04-18
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公开(公告)号: US20050233122A1公开(公告)日: 2005-10-20
- 发明人: Mikio Nishimura , Toshihiko Mori , Kazuhiko Honjou , Junichi Kimura , Toshihiro Nishii , Shinji Harada , Motoyoshi Kitagawa
- 申请人: Mikio Nishimura , Toshihiko Mori , Kazuhiko Honjou , Junichi Kimura , Toshihiro Nishii , Shinji Harada , Motoyoshi Kitagawa
- 优先权: JP2004-122575 20040419
- 主分类号: B32B3/00
- IPC分类号: B32B3/00 ; H01L21/56 ; H01L23/31 ; H01L23/538 ; H05K1/18 ; H05K3/28 ; H05K3/46
摘要:
The invention presents a manufacturing method of laminated substrate capable of realizing small size of portable electronic appliances. Prepreg 141 is a thermosetting resin which holds a plate form in first temperature range, has a thermal fluidity in second temperature range, and is cured in third temperature range, and integrating process (118) includes softening (120) of heating prepreg (141) to second temperature range, and softening the resin impregnated in prepreg (141), forced flowing (122) of compressing prepreg (141) before prepreg (141) comes to third temperature range, and forcing the resin to flow into space and gap formed among semiconductor (105), resistor (106), and substrate (101), and hardening (123) of heating prepreg (141) to third temperature range. As a result, without using intermediate material, space and gap formed among semiconductor (105), resistor (106), and substrate (101) can be securely filled with resin.