Invention Application
- Patent Title: Flash memory device having a split gate and method of manufacturing the same
- Patent Title (中): 具有分裂栅的闪存器件及其制造方法
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Application No.: US11119801Application Date: 2005-05-03
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Publication No.: US20050250282A1Publication Date: 2005-11-10
- Inventor: Eui-youl Ryu , Chul-soon Kwon , Jin-woo Kim , Yong-hee Kim , Dai-geun Kim , Joo-chan Kim
- Applicant: Eui-youl Ryu , Chul-soon Kwon , Jin-woo Kim , Yong-hee Kim , Dai-geun Kim , Joo-chan Kim
- Priority: KR04-31671 20040506
- Main IPC: H01L21/8247
- IPC: H01L21/8247 ; H01L21/336 ; H01L27/115 ; H01L29/423 ; H01L29/788 ; H01L29/792

Abstract:
A flash memory device having a split gate that can prevent an active region and a floating gate electrode from being misaligned, and a method of manufacturing the same, includes sequentially stacking a gate oxide layer and a floating gate conductive layer on a semiconductor substrate, forming an isolation layer in a predetermined region of the semiconductor substrate where the floating gate conductive layer is formed, and defining an active region. Then, a local oxide layer is formed by oxidizing a predetermined part of the floating gate conductive layer on the active region. A floating gate electrode structure is formed by patterning the floating gate conductive layer using the local oxide layer.
Public/Granted literature
- US07094646B2 Flash memory device having a split gate and method of manufacturing the same Public/Granted day:2006-08-22
Information query