发明申请
US20050254045A1 Inspection of TFT LCD panels using on-demand automated optical inspection sub-system
有权
使用按需自动光学检测子系统检查TFT液晶面板
- 专利标题： Inspection of TFT LCD panels using on-demand automated optical inspection sub-system
- 专利标题（中）： 使用按需自动光学检测子系统检查TFT液晶面板
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申请号： US10846457申请日： 2004-05-14
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公开(公告)号： US20050254045A1公开(公告)日： 2005-11-17
- 发明人: Adam Weiss , Afsar Saranli
- 申请人： Adam Weiss , Afsar Saranli
- 申请人地址： US CA San Jose
- 专利权人： Photon Dynamics, Inc.
- 当前专利权人： Photon Dynamics, Inc.
- 当前专利权人地址： US CA San Jose
- 主分类号： G01N21/88
- IPC分类号： G01N21/88 ; G01N21/95
摘要：
In an inspection system for electrical and electro-optical inspection of TFT-LCD panels, a fine resolution area imaging camera with a pulse illumination source disposed to scan the region and operative capture images of the region illuminated with pulses of short illumination and automatically maintained in focus while continuously scanning in order to resolve points of defects.
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