发明申请
- 专利标题： Physical nano-machining with a scanning probe system for integrated circuit modification
- 专利标题（中）： 物理纳米加工用扫描探针系统进行集成电路修改
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申请号： US10848925申请日： 2004-05-19
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公开(公告)号： US20050260775A1公开(公告)日： 2005-11-24
- 发明人: Michael DiBattista , Richard Livengood , Elizabeth Varner , Randall White
- 申请人： Michael DiBattista , Richard Livengood , Elizabeth Varner , Randall White
- 主分类号： G01Q10/00
- IPC分类号： G01Q10/00 ; G01Q80/00 ; H01L21/66 ; H01L21/768
摘要：
Nano-machining for circuit edits through the front side or backside of an integrated circuit may be performed using a scanning probe system. The system may create access holes with smaller dimensions and facilitate nano-machining endpoint detection in some embodiments.
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