发明申请
- 专利标题: Lamp assembly having flexibly positioned rigid plug
- 专利标题(中): 灯组件具有灵活定位的刚性插头
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申请号: US10877246申请日: 2004-06-25
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公开(公告)号: US20050286243A1公开(公告)日: 2005-12-29
- 发明人: Joseph Ranish , Abhijit Desai , Apollo Havelind
- 申请人: Joseph Ranish , Abhijit Desai , Apollo Havelind
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 主分类号: F21V33/00
- IPC分类号: F21V33/00 ; F27B17/00 ; F27D99/00 ; H01L21/00
摘要:
A lamp assembly for a substrate processing chamber is described. The lamp assembly comprises a tubular body having first and second ends, a lamp element at least partially seated in the first end having a filament and first electrical connectors, transmission wires attached to the first electrical connectors, and a rigid plug flexibly positioned relative to the second end of the tubular body having second electrical connectors attached to the transmission wires. The flexibly positioned rigid plug is generally capable of a range movement in directions both perpendicular and parallel to a longitudinal axis of the tubular body. In one version, the rigid plug comprises first and second plug elements.
公开/授权文献
- US07147359B2 Lamp assembly having flexibly positioned rigid plug 公开/授权日:2006-12-12
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